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Imazono, Takashi; Koike, Masato
no journal, ,
Soft X-ray emission spectroscopy is a powerful tool for a nondestructive evaluation technique for the electronic structure of a buried layer such as an absorber in thin-film solar cells. In our previous study, a wide band W/B
C multilayer grating spectrograph has been successfully developed, but the detection area cannot cover the energy range of 1-3.5 keV, in which the characteristic X-ray lines of Cu-
(0.9 keV), In- (3.4 keV), Se- (1.4 keV) from a CIS solar cell are included. We newly developed a wide band Ni/C multilayer grating to cover the energy range from 1 keV to 3.5 keV at a constant incidence angle.
Imazono, Takashi; Koike, Masato; Koeda, Masaru*; Nagano, Tetsuya*; Sasai, Hiroyuki*; Oue, Yuki*; Yonezawa, Zeno*; Kuramoto, Satoshi*; Terauchi, Masami*; Takahashi, Hideyuki*; et al.
no journal, ,
We developed a flat-field spectrograph for soft X-ray emission spectroscopy in 50-4000 eV to be able to be installed in electron microscopes. The diffraction efficiency and resolving power of the spectrograph were evaluated by using synchrotron radiation and laser produced plasma soft X-ray light sources, respectively. The spectral performance of the spectrograph installed in a transmission electron microscope was evaluated. The K emission spectrum from metallic lithium and the L emission lines of indium and tin from tin-doped indium oxide (ITO) were clearly observed around 54 eV and 3.6 keV, respectively.